Product Description
Ultra-Low-Range Gas Mass Flow Controller for Precision Gas Delivery
The Series GFC Model GFC-2109 Gas Mass Flow Controller is engineered for applications demanding extremely fine control at flow rates up to 5 LPM. Its straight-tube thermal sensor and precision restrictor element maintain consistent output even when inlet pressure or temperature fluctuate — making this controller ideal for laboratory gas panels, research systems, and thin-film deposition tools.
Automation-ready electronics accept industry-standard analog control signals, while the integrated tiltable LCD allows quick verification and adjustment at the instrument.
Gas Flow Control Specifications – Model GFC-2109
• Flow Range: 0–5 LPM (N₂ equivalent @ 70 °F, 760 mm Hg)
• Accuracy: ±1% FS (±1.5% FS for select X143–X145 models)
• Repeatability: ±0.5% FS
• Response Time: 2 seconds to ±2% of setpoint
• Maximum Pressure: 1000 psig (500 psig for select models)
• Output Signals: 0–5 VDC and 4–20 mA
• Power Supply: ±12 VDC
• Display: 3-1/2-digit, 90° tiltable LCD
• Leak Integrity: 1 × 10⁻⁹ sccs He
• Wetted Materials: Anodized aluminum, brass, 316 SS, fluoroelastomer O-rings
• Temperature Limits: 32–122 °F (0–50 °C)
• Maximum Particle Size: 5 microns
Process Applications
• Ultra-low gas dosing
• Laboratory research systems
• Vacuum processing equipment
• Thin-film deposition tools
• Glass and metal coating
• Semiconductor development
• Pilot manufacturing
Why Engineers Specify the GFC-2109
✔ Maintains micro-flow stability via PID-controlled valves
✔ Offsets temperature and inlet-pressure changes
✔ Interfaces with automation platforms
✔ Local digital flow readout
✔ Works with GFT2 flow totalizers
✔ Includes NIST-traceable calibration certificate
