Product Description
Ultra-Fine Gas Mass Flow Control for Critical Process Lines
The Series GFC Model GFC-2110 Gas Mass Flow Controller delivers exceptional stability in applications requiring very low flow rates up to 10 LPM. A straight-tube thermal sensor combined with a precision restrictor element keeps output steady even when inlet pressure or temperature change — making this controller ideal for laboratory gas panels, pilot systems, and thin-film deposition tools.
Automation-ready electronics accept standard analog control signals, while the tiltable LCD allows fast local verification and troubleshooting in production environments.
Gas Flow Control Specifications – Model GFC-2110
• Flow Range: 0–10 LPM (N₂ equivalent @ 70 °F, 760 mm Hg)
• Accuracy: ±1% FS (±1.5% FS for select X143–X145 models)
• Repeatability: ±0.5% FS
• Response Time: 2 seconds to ±2% of setpoint
• Maximum Pressure: 1000 psig (500 psig for select models)
• Output Signals: 0–5 VDC and 4–20 mA
• Power Supply: ±12 VDC
• Display: 3-1/2-digit, 90° tiltable LCD
• Leak Integrity: 1 × 10⁻⁹ sccs He
• Wetted Materials: Anodized aluminum, brass, 316 SS, fluoroelastomer O-rings
• Temperature Limits: 32–122 °F (0–50 °C)
• Maximum Particle Size: 5 microns
Process Applications
• Precision gas metering
• Vacuum system integration
• Thin-film coating tools
• Glass and metal deposition
• Semiconductor research equipment
• Pilot manufacturing systems
• Pump and valve operation
Why Engineers Specify the GFC-2110
✔ Maintains ultra-stable low-flow setpoints via PID regulation
✔ Offsets temperature and pressure fluctuations
✔ Interfaces with automation controllers
✔ Local digital readout in engineering units
✔ Works with GFT2 flow totalizers
✔ Includes NIST-traceable calibration certificate
